The MEMS piezoelectric pump is a revolutionary product of micropump
manufacturing technology. It uses the inverse piezoelectric effect of
piezoelectric ceramics to deform the piezoelectric vibrator, which in
turn causes volume changes of pump chamber to achieve fluid
transportation.
MEMS piezoelectric pumps have the characteristics of extremely small
size, high integration, low power consumption, high specific flow
rate, and high specific back pressure. They have unique advantages and
can be applied in the fields of microfluidics, medical devices, and
semiconductor thermal management, especially suitable for integrated
applications of microsystems.
