MEMS piezoelectric pump uses the inverse piezoelectric effect of piezoelectric ceramics to make the piezoelectric vibration deformation, and then causes the content of the pump cavity to change, so as to realize the fluid transport.The characteristics of small size, high integration, low power consumption, high specific flow rate and high specific back pressure have unique advantages in microfluidic, high-end medical, semiconductor thermal management and other fields, especially suitable for microsystem integration applications.